Gasonics A90-039-02 Current Sensor Module

Gasonics A90-039-02 Current Sensor Module

Product Details Introduction

product name

Gasonics A90-039-02 Current Sensor Module

(English: Current Sensor Module)

1、 Product Overview

Gasonics A90-039-02 is a current monitoring module specifically designed for the Gasonics series plasma cleaning/ashing equipment, used for real-time detection of the working current of key components such as internal power circuits, solenoid valves, heating units, and RF systems. This module provides isolated signal output, which is transmitted to the main control system for process control, safety protection, and fault alarm.

2、 Technical parameters

Module Type: Current Sensor/Current Detection Module

Equipment adaptation: Suitable for Gasonics Aura, L2100, L3510, AE2001 and other devices

Measurement range: Typical current range is 0-20A (depending on specific configuration)

Output signal:

Analog voltage output (proportional output, typically 0-5V or 0-10V)

Or current signal (e.g. 4-20 mA, depending on device configuration)

Electrical isolation: with photoelectric/magnetic isolation between input and output

Installation method: Modular card structure, pluggable and installed in the equipment backplane or functional card rack

Interface method: Connect standard terminals or ribbon cables to the main control module or data acquisition card

Power supply requirements:+15V or+24V DC

Indication function: The module panel may have a running status LED

Product imag

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