Gasonics 90-1002-02 Valve Control Module

Gasonics 90-1002-02 Valve Control Module

Product Details Introduction

product name

Gasonics 90-1002-02 Valve Control Module

Valve Control Module

1、 Product Overview

The Gasonics 90-1002-02 valve control module is a key component used in Gasonics (now known as Novellus Systems, partially integrated into Lam Research) plasma ashing and cleaning equipment to control the opening and closing of gas or vacuum system valves. This module achieves precise on/off control of multiple gas path valves by receiving control signals from the main control system, ensuring accurate adjustment of gas flow rate and process atmosphere during the plasma process.

2、 Technical parameters

Equipment type: Gas/Vacuum Valve Control Module

Control channel: Multi channel solenoid valve control (the specific number of channels depends on the configuration)

Input signal:

TTL or 24VDC control signal (from main control board or PLC)

Output format:

Control the opening or closing status of the solenoid valve (ON/OFF)

Power supply requirements:

Usually+24 VDC (module power supply and valve drive)

Status indication:

Onboard LED indicates the status of each channel valve

Interface method:

Slot type connection or backplane connection

Communicate with the main controller or I/O card through an internal bus

Compatible models:

Compatible with multiple plasma equipment models such as Gasonics Aura, L3510, L2100, AE2001, etc

Product imag

Related website links

ASEA 2668 184-447 Communication Module

RADISYS EXM-HDEXM-MX Memory Module

VMIVME-2540 Intelligent Counter Controll

Other website links

ABB 3DDE300410 显示器模块

ABB GVC703AE01可控硅IGCT卡

ASEA ES1211模块板卡