Gasonics AWD-D-1-0-023-007 power module

Gasonics AWD-D-1-0-023-007 power module

Product Details Introduction

Product Name: Gasonics AWD-D-1-0-023-007 Power Module

Component type: RF Plasma Power Supply Module

Main function: Provide high-frequency power for Gasonics plasma equipment to excite and maintain the plasma state inside the process chamber

1、 Process core: plasma excitation

This module is responsible for converting electrical energy into high-frequency radio frequency energy, which is coupled to the gas inside the process chamber through a matching network to achieve plasma excitation for processes such as cleaning, debonding, and surface treatment.

Key technical characteristics (typical, specific based on model):

Output power: typically between 300W and 600W

Frequency range: 13.56 MHz (standard industrial plasma frequency)

Output mode: Continuous Wave (CW), partially supports pulse output

Cooling method: forced air cooling or air duct cooling

2、 Typical application process

Widely used in the following stages of semiconductor manufacturing:

Photoresist Ashing after Photolithography

Oxygen plasma cleaning (O ₂ Plasma Clean)

Surface activation and pretreatment

Etching assisted process (mild RIE)

3、 System integration and control interface

AWD-D-1-0-023-007 is usually installed in the electrical cabinet of plasma cleaning equipment, working in conjunction with the main control board, RF matching network, and power detector.

Main interfaces/functions:

Receive power or switch signals set by the main control system

Provide monitoring signals for actual output power and reflected power

Supports overvoltage, over temperature, and standing wave protection functions

Cooperate with the automatic tuning of the matching device to minimize reflection

Product imag

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