Gasonics 95-3510-44 Valve Assembly

Gasonics  95-3510-44 Valve Assembly

Product Details Introduction

Gasonics 95-3510-44 Valve Assembly

1、 Basic Information

Project Content

Part number 95-3510-44

Name: Valve Assembly

Applicable equipment Gasonics plasma cleaning system (such as AURA, A-2000 series)

Manufacturer Gasonics/Novellus (now part of Applied Materials)

Type of pneumatic control module (pneumatic or electromagnetic)

2、 Functional purpose

This component is the gas flow control unit in Gasonics equipment, used to control the switching, flow direction, blowing or switching of gas, usually integrated in:

Process Chamber

Loadlock

Gas manifold

Vent/Pump pipeline interface

Commonly used in the following functional scenarios:

Function type description

Vent control chamber exhaust/ventilation

Gas on-off control for processes such as N ₂, O ₂, Ar, etc

Vacuum isolation control valve between vacuum chamber and vacuum pump

Blowing/emission control blowing gas switching or exhaust gas discharge path

Product imag

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