Gasonics 06764-002 Controller Board

Gasonics 06764-002 Controller Board

Product Details Introduction

1、 Basic Information

Project Content

Part number 06764-002

Name Controller Board

Brand/Manufacturer Gasonics (later merged into Applied Materials)

Application category: Plasma equipment subsystem control board

2、 Function Description

The Gasonics 06764-002 controller board is typically used as a subsystem independent control module in Gasonics plasma equipment. It may belong to one of the following control categories:

Valve control module (switch air circuit, solenoid valve action)

Temperature control unit interface board (used for heater control and thermocouple signal feedback)

Microprocessor interface control board (used to coordinate digital signals of PLC or upper computer)

Vacuum pump/chamber control interface (controls vacuum valve switch and chamber status feedback)

Although 06764-002 is not the main control board, it performs important branch control functions in the system.

3、 Possible uses (based on series logic)

Since the control board numbers of Gasonics are usually similar in function in the same sequence, 06764-002 is likely to be controlled by one of the following modules:

Function Description of Control Object

Gas path module controls Mass Flow Controller (MFC) or gas valve

The door control/locking system controls the Loadlock chamber door electromagnetic lock and provides feedback on the door status

Signal interface adapter receives digital/analog signals from sensors and feeds them back to the main control board

If the device has a heating function, the temperature control interface may be responsible for temperature regulation signal processing

Product imag

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