Gasonics 06763-005 Control Board

Gasonics 06763-005 Control Board

Product Details Introduction

1、 Basic Information

Part number: 06763-005

Name: Control Board

Equipment manufacturer: Gasonics (now under Applied Materials)

Usage category: Control of internal subsystems/interface coordination of equipment

2、 Function Introduction

The 06763-005 control board is a functional module control board used in the Gasonics plasma stripping system. Its main functions are:

Manage the status and actions of a subsystem or peripheral device (such as elevators, sensors, power modules, etc.)

Execute system control commands (logic control, switch action, relay drive)

Implement input/output (I/O processing) of device control signals

Communicate with the main control board, provide feedback on status or receive commands

3、 Possible uses (based on similar model logic)

Although the board is a non main control board (such as A90-003-01), it usually performs one of the following functions:

Functional Direction Description

Elevator control controls the movement of the lifting platform within Loadlock or Process Chamber

Electromagnetic valve drives and controls the on/off of pneumatic valves, supporting automatic processes

Photoelectric sensor management receives status from upper/lower sensors and door switches

The status interlock management sends information to the main control, such as whether the system is ready and whether the door is closed

Product imag

Related website links

GE IS210BPPBH2BMD Controller Module

KOLLMORGEN CP310250 PRD-P310250Z-55 serv

IS420PUAAH1A Ethernet Switch

Other website links

ABB 1TGE120011R2200 电机馈线控制单元

ASEA E-31709机器人电路板

ABB 3DDE300417 变频器模块