TEL Tokyo Electron 3M80-001239-11 Circuit Breaker Module

TEL Tokyo Electron 3M80-001239-11 Circuit Breaker Module

Product Details Introduction

The TEL Tokyo Electron 3M80-001239-11 circuit breaker module is an electrical protection module used in TEL semiconductor manufacturing equipment. Its main function is to automatically cut off abnormal currents (such as overload and short circuit) in the equipment power supply system to protect the safe operation of critical circuits, control systems, and load equipment.

1、 Basic Information

Module Name: Circuit Breaker Module

Model: 3M80-001239-11

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: In machine power distribution and protection module

Installation location: usually located at the electrical control cabinet, power distribution board, or host power input

2、 Core functions

overload protection

When the device continues to run and the current exceeds the safe value, it automatically disconnects the circuit to prevent component damage or heating.

Short circuit protection

In the event of a sudden short circuit in the circuit, instantly cut off the circuit to avoid power system collapse or the risk of fire.

Branch allocation control

Distribute the main power supply to multiple subsystems, such as heaters, vacuum pumps, RF power supplies, motors, etc., and provide independent protection for each.

Interlocking control and remote reset function (depending on version)

Linkage with TEL main control system to achieve power outage alarm or PLC control; Some models support remote reset function.

3、 Typical application devices

This module is widely used in the following TEL device systems:

Etch (dry etching system)

Control the power safety protection of the plasma source and gas supply system.

CVD/ALD (Thin Film Deposition System)

Provide current protection for heating units, chemical source controllers, etc.

Track Systems (Lithography Process Equipment)

Safely isolate the power circuits of modules such as the developing unit and baking unit.

Wafer Handling/Transfer Modules

Ensure the power safety of robots, vacuum adsorption systems, and other equipment.

Product imag

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