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TEL Tokyo Electron 2981-600832-11 Input/Output Module
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TEL Tokyo Electron 2981-600832-11 Input/Output Module
Product Details Introduction
Product model: 2981-600832-11
Product Name: I/O Module
Manufacturer: Tokyo Electron (TEL)
1、 Product Overview:
2981-600832-11 is an I/O module that integrates digital input and output functions. It is commonly used in various semiconductor devices of Tokyo Electron to collect control signals and drive output functions with peripheral devices such as sensors, actuators, valves, limit switches, etc.
2、 Main functions:
Input function: Collect digital signals generated by external sensors, buttons, switches, etc
Output function: Control digital output devices such as solenoid valves, relays, lights, buzzers, etc
Realize the role of signal bridge for internal state detection and action control of equipment
Support the implementation of control logic such as logical linkage and interlock protection
3、 Technical parameters (refer to the general design of TEL I/O module, specific details can be found in the original specification sheet):
Parameter item content
Input type: Digital input (typical 24V DC, optocoupler isolated)
Output type: Digital output (relay or transistor output)
Number of channels: 8/16/32 input+output (possible combination)
Installation method: card insertion installation, installed in the TEL equipment control rack
The communication method is connected to the control motherboard (such as PLC or IPC backplane) through the TEL device bus
Interface form: Flat ribbon cable interface or industrial terminal block connection
The status indicator module may integrate LED indicator lights to display channel status
4、 Example of application device:
This module is suitable for the following types of Tokyo Electron semiconductor devices:
Coater/Developer
Etcher (Etcher)
Chemical Vapor Deposition Equipment (CVD)
Wafer Handling System
Vacuum chamber automation system
Security and interlock control module
Product imag
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