TEL Tokyo Electron 2981-600534-11 Printed Circuit Board
Product Details Introduction
Product model: 2981-600534-11
Product Name: Printed Circuit Board (PCB)
Manufacturer: Tokyo Electron Ltd
1、 Product Overview:
2981-600534-11 is a specialized printed circuit board module used in Tokyo Electron (TEL) semiconductor equipment. It is usually integrated into the internal control system or signal processing unit of the device, responsible for key functions such as signal acquisition, processing, transmission, or control logic implementation. This type of PCB is usually customized for TEL and has a design that matches its specific model or control architecture.
2、 Possible functional roles (inferred based on TEL device PCB classification):
Due to TEL typically using specific numbers to identify its PCB, 2981-600534-11 may belong to one of the following types:
Type Function Description
The I/O interface board connects external sensors or actuators and performs signal conversion and transmission with the main control unit
The control logic board is responsible for part of the program control logic and works in conjunction with the CPU
Power distribution board distributes/stabilizes the power required by different modules inside the equipment
Communication interface board communicates with fieldbus or other modules (such as RS-232C, CAN, Ethernet, etc.)
The dedicated function processing board handles specific device functions, such as cavity temperature control, pressure signal analysis, motor drive, etc
3、 Applicable equipment field:
This circuit board is commonly used for subsystems in the following equipment series:
TEL ACT series coating and developing equipment
TEL Unity/Trias/Telius series etching equipment
TEL Clean Track series wafer handling and pre-processing equipment
Auxiliary control module in TEL CVD/ALD system
Product imag

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