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  • TEL Tokyo Electron 3281-000095-13 Printed Circuit Board
  • TEL Tokyo Electron 3281-000095-13 Printed Circuit Board
  • TEL Tokyo Electron 3281-000095-13 Printed Circuit Board
TEL Tokyo Electron 3281-000095-13 Printed Circuit Board TEL Tokyo Electron 3281-000095-13 Printed Circuit Board TEL Tokyo Electron 3281-000095-13 Printed Circuit Board

TEL Tokyo Electron 3281-000095-13 Printed Circuit Board

TEL Tokyo Electron 3281-000095-13 Printed Circuit Board

Product Details Introduction

1、 Basic Information

Product model: 3281-000095-13


Product Name: Printed Circuit Board (PCB)


Manufacturer: TEL (Tokyo Electron Limited, Tokyo Electronics, Japan)


Product Category: Printed Circuit Board for Signal Processing/Control Applications


Revision version: -13 (representing the 13th version or hardware revision of the board)


2、 Main functions (inferred based on TEL numbering rules and application background)

Functional category description

Signal transmission is used for control signal or data communication transmission between internal modules of equipment.

Control logic bridging may serve as an interface bridge between the main control board and subordinate execution units.

IO expansion supports digital or analog input/output signal expansion, connecting sensors or actuators.

Auxiliary communication may carry CAN, serial port (RS-232/485), or TEL dedicated communication protocol connection functions.


3、 Typical application scenarios

This PCB board may be widely used in the following TEL semiconductor manufacturing equipment:


Photolithography pre-processing and post-processing equipment (such as ACT series Coater/Developer)


Etching equipment (such as Tactras series)


CVD/ALD thin film deposition equipment


Wafer handling module, vacuum loading port system


In these systems, circuit boards may be used to connect and drive the following sub components:


Temperature/pressure sensor


Actuators (solenoid valves, motors)


Heating table or cooling device


Status indicator or control button panel

Product imag

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