TEL Tokyo Electron 3D81-000020-V3 Power PCB Card

TEL Tokyo Electron 3281-000146-12 Driver Module

Product Details Introduction

1、 Basic Information

Product model: 3D81-000020-V3

Product Name: Power Supply PCB Board

Manufacturer: Tokyo Electron Limited (TEL)

Module type: Printed circuit board for power distribution and management

Version number: V3 (representing the third version, hardware optimized or upgraded for specific systems)

2、 Main functions

Functional category description

Power distribution receives external or higher-level module power and distributes power to multiple sub modules or subsystems for use.

The voltage conversion is equipped with a built-in DC-DC or voltage regulator chip, which converts the input voltage into the required operating voltage (such as 24V to 5V/12V).

Overload/short circuit protection provides electrical protection mechanisms such as overvoltage, overcurrent protection, and anti reverse design.

Status monitoring may have auxiliary functions such as LED status indication and voltage monitoring.

The signal interface provides power communication and status feedback interface with the control board.

3、 Typical application scenarios

This power PCB card is widely used in the following TEL device modules:

Lithography process support system (such as Clean Track ACT series)

Provide stable power supply for controllers, sensors, heating modules, motors, etc

CVD/Etch system (thin film deposition or etching)

Power management for key chamber heating elements, vacuum controllers, and gas flow modules

Handling and Vacuum Chamber Control System

Provide power supply for lifting devices, robotic arm controllers, and sensing feedback circuits

Product imag

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