TEL Tokyo Electron 3M87-021634 Control Unit Components

TEL Tokyo Electron 3M87-021634 Control Unit Components

Product Details Introduction

Product model: 3M87-021634

Product Name: Control Unit Assembly

Manufacturer: Tokyo Electron Ltd. (TEL)

Component type: subsystem control component/electronic control module assembly

1、 Function Introduction

The control unit component is an integrated control module in TEL semiconductor equipment, which may be composed of one or more circuit boards (such as control board, I/O board, driver board) combined and installed in a specific control box or module area, mainly used for:

Control and coordinate the operation of a specific area or subsystem of equipment

Manage signal input/output, power switch, action execution, etc

Implement local logic judgment, sensor feedback processing, and linkage control

Interconnected with the main system (such as the main control CPU board) through communication interfaces

2、 Typical application scope

Etch/CVD/ALD control unit

Control gas valves, heaters, RF adapters, vacuum systems, and other components.

Wafer Transfer Arm/Load Port System

Manage the collaborative operation of robotic arm movements, lifting platforms, and position sensors.

Vacuum system or Loadlock control module

Control the start stop of vacuum pump, pressure monitoring, solenoid valve switching, etc.

Liquid supply and cleaning module

Control the operation process of DI water, chemical solution, blow drying, etc.

3、 Technical characteristics (refer to the general structure of TEL control components)

Composed of multiple functional boards, uniformly installed on a metal casing or bracket

Equipped with standard industrial connectors (D-sub, AMP, Hirose, MIL connectors, etc.)

Support multiple digital input/output and analog signal processing

Some may contain relays, power regulation, and status indicator units

Hot swappable or modular maintenance, high replacement efficiency

Product imag

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