TEL Tokyo Electron 1B80-002822-11 Control Board

TEL Tokyo Electron 1B80-002822-11 Control Board

Product Details Introduction

Product model: TEL Tokyo Electron 1B80-002822-11

Product type: Control PCB

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Function Overview

This control board is used in TEL semiconductor manufacturing equipment and mainly undertakes the following functions:

Manage the operation of local device units (such as valves, heaters, pumps, etc.)

Receive instructions from the main control system and output control signals

Collect sensor data and provide feedback to the main control system

Implement interlocking protection and process logic control

May include analog and digital signal interfaces

2、 Typical application areas

Etcher system

Control key process units such as vacuum valves, RF power supplies, and gas flow rates.

Thin film deposition system (CVD/ALD)

Manage temperature control, gas mixing, and valve drive logic.

Wafer Transfer System (Loadlock, Transfer Arm)

Control the actions of the robotic arm, position sensor, and access control system.

Cleaning system or drying module

Control liquid delivery, solenoid valves, and temperature control units.

3、 Technical characteristics (common)

Multi channel input/output interface (digital/analog)

Communication interface: TTL, RS485 or dedicated bus

May contain MCU or logic control chip

Signal isolation and filtering function

Used in conjunction with TEL control motherboard, relay board, etc

Product imag

Related website links

ASEA ES1211 module board

ABB UN0807C-P Programmable Controller

HE700GEN200 Network Interface Module

Other website links

ABB REG670 1MRK002826-AC 安全系统组件

ABB 1VCR007346 G0032 显示器模块

GESSBS-6AH256 固态驱动器