TEL Tokyo Electron 3M81-036411-12 Gas Pressure Monitoring Board

TEL Tokyo Electron 3M81-036411-12 Gas Pressure Monitoring Board

Product Details Introduction

TEL Tokyo Electron 3M81-036411-12 Gas Pressure Monitoring Board

Category: Gas Pressure Monitoring Module/Gas Pressure Monitoring Board

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

This gas pressure monitoring board is used in semiconductor manufacturing equipment, mainly to achieve real-time monitoring and feedback of pressure in the gas supply system. Its functions include:

Collect pressure signals from gas pipelines or tanks

Real time monitoring and status judgment of pressure values

Transmit pressure status signals to the main control system or safety interlock module

Realize overpressure and undervoltage alarm and automatic protection linkage

Support multiple pressure sensor inputs and provide multi-point monitoring

2、 Typical application areas

gas supply system

Monitor the pressure conditions of process gases, auxiliary gases, cleaning gases, etc

Ensure the stability and safety of gas flow control

Vacuum and Inert Gas Protection System

Monitor the inlet and outlet pressure of the vacuum pump to prevent gas leakage or vacuum damage

Valve and flow controller protection

Linkage gas valve switch to prevent equipment failure caused by abnormal pressure

Process safety interlock

Realize automatic gas cut-off or alarm in case of abnormal pressure, ensuring the safety of equipment and personnel

Product imag

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