TEL Tokyo Electron 1D08-000130-11 Processor Module
Product Details Introduction
TEL Tokyo Electron 1D08-000130-11 Processor Module
Category: Processor Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This processor module is one of the core control units in TEL semiconductor equipment, and its main functions include:
Execute the main control logic and computational tasks of the device
Process input sensor data and control commands
Communication and coordination with other modules such as I/O boards, driver boards, relay boards, etc
Support automated process control and status monitoring of equipment
Manage system parameters and configurations of devices
2、 Typical application areas
Main control of semiconductor manufacturing equipment
Run the process control program, coordinate equipment actions and process parameters
Realize communication between equipment and upper level systems (MES, factory automation system)
Wafer processing system
Manage the operation of subsystems such as wafer handling, chamber control, and gas supply
Real time processing of process status and alarm information
Equipment safety and interlocking
Perform safety logic judgment to ensure the safe operation of equipment
Monitor key parameters and trigger protective measures
3、 Technical characteristics
Integrate high-performance microprocessors or microcontrollers
Support multiple communication interfaces (such as Ethernet, serial port, fieldbus, etc.)
Built in memory for program and data storage
Strong anti-interference design, suitable for industrial environments
Function expansion can be achieved through firmware upgrade
Product imag

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