TEL Tokyo Electron 3M81-029643-12 Motor Distribution Board

TEL Tokyo Electron 3D81-000049-V2 Interface Module

Product Details Introduction

3M81-029643-12 Motor Distribution Board

Manufacturer: Tokyo Electron Ltd. (TEL)

Component type: Motor Distribution PCB

1、 Function Overview

The 3M81-029643-12 motor distribution board is a centralized control module for electric actuators used in TEL semiconductor manufacturing equipment. Its main function is to:

Distribution of control signals from autonomous controllers or drivers to multiple motors in the future

Manage power supply, signal relay, and operational status feedback for multiple motors

Implement modular wiring and group control for multiple motion control channels

Ensure interlocking, synchronization, or independent control of the operation between different motors

2、 Typical application areas

This distribution board is widely used in system modules involving wafer handling, positioning, lifting, and other actions in TEL equipment, including but not limited to:

1. Wafer Transfer Module

Control multiple motors for the rotation, extension, and lifting of the robot arm

Realize multi axis collaborative motion and positioning feedback

2. Load Port/EFEM (Front End Wafer Loading)

Manage motor actions such as platform lifting, electric door opening and closing, mechanical limit reset, etc

Support safety interlock signals between sensors and motors

3. Vacuum chamber auxiliary device

Control gate switch motor, cavity tray rotation motor, etc

Collaborate with cavity vacuum sensors and access control feedback mechanisms

4. Chemical treatment/cleaning/drying system

Drive liquid switching valve, pump motor or spray head positioning device

Accurately control fluid channels and spray action paths

Product imag

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