TEL Tokyo Electron 3D81-000049-V2 Interface Module

TEL Tokyo Electron 3D81-000049-V2 Interface Module

Product Details Introduction

3D81-000049-V2

Product Name: Interface Module

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

The 3D81-000049-V2 interface module is an electronic communication or signal conversion unit in TEL semiconductor equipment, mainly used to implement:

Signal bridging and conversion between different functional boards (such as main control board, driver board, sensor board)

Electrical interface management between external devices and control systems

Input/output allocation and conditioning of digital/analog signals

2、 Typical application areas

This module is widely used in various TEL devices, especially in precision automation systems and multi signal interactive control scenarios, mainly including the following categories:

1. Wafer Handling System (Load Port/Transfer Module)

Connect the robotic arm, motor controller, position sensor, photoelectric switch, etc

Signal flow for managing wafer grabbing, movement, alignment, and other actions

2. Gas control and chemical supply system

Connect MFC (Mass Flow Controller), solenoid valve, pressure sensor, etc

Convert analog signals into control commands or upload data to the main control system

3. Etch/CVD/ALD cavity area

Input and output of temperature, pressure, plasma state, and other information within the management chamber

Logical connection with heater control, power management, and vacuum valve

4. System communication or remote I/O expansion

Expand the local input/output interface of TEL control system

Compatible with various sensors, actuators, and feedback modules

Product imag

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