TEL Tokyo Electron 1D81-000104 Interface PCB Board

TEL Tokyo Electron 1D81-000104 Interface PCB Board

Product Details Introduction

TEL Tokyo Electron 1D81-000104 Interface PCB Board

Type: Interface Printed Circuit Board

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

This board belongs to the standardized electronic interface module in TEL semiconductor equipment, which is used for the access and forwarding of internal control signals, power signals, and analog/digital signals in the equipment. It is one of the relay nodes that executes control logic in the system. The main functions include:

Provide electrical interfaces between various modules within the device, such as sensors, drivers, actuators, etc

Support multi-channel signal transmission: such as I/O digital signals, analog signals, power signals, etc

Realize signal conditioning, conversion, and isolation between different device modules

Support logical judgment, filtering, voltage stabilization and other processing of signals

2、 Typical application areas

1. Etch/CVD/ALD and other main process chamber control systems

Receive instructions from the main control board (such as CPU board or process controller)

Transmit control signals to devices such as heaters, valves, and gas flow controllers (MFCs)

Return sensor data such as temperature, air pressure, and position inside the process chamber

2. Wafer Transfer System (Loadlock/Transfer Module)

Manage signal communication between equipment such as robotic arms, motor drivers, position detection sensors, and pneumatic components

Assist in completing wafer loading, transportation, alignment and other operational processes

3. Power and grounding distribution system

Provide power input channels with protection, filtering, and overload protection

Send stable power to multiple sub modules (driver board, control board, signal board, etc.)

4. Equipment Interlocking and Security System

Connect signals such as limit switches, safety door sensors, emergency stop switches, etc

Cooperate with the equipment interlocking logic system to ensure that the equipment automatically shuts down or enters a protective state in case of abnormalities

Product imag

Related website links

ASEA DSCA121 Robot Control Board

KOLLMORGEN CP310250 servo driver

IC3600SVZA1B control board

Other website links

GE DS3800HI0C1L1H 扩展板模块

ABB 1TGE120021R0610 HW3 通信模块

AMAT 0190-07842 印刷电路板