TEL Tokyo Electron SPC-T0040A-11 Circuit Board

TEL Tokyo Electron SPC-T0040A-11 Circuit Board

Product Details Introduction

The TEL Tokyo Electron SPC-T0040A-11 circuit board is a specialized electronic module in Tokyo Electron semiconductor equipment, commonly used in its front-end or back-end process systems, such as coating and development CVD、 Used in etching and other equipment to support device control and signal processing functions.

1、 Basic Information

Product model: SPC-T0040A-11

Product Type: Control or Interface Circuit Board

Manufacturer: TEL (Tokyo Electron Limited)

Main purpose: Processing control signals, interface conversion, or executing component control in TEL equipment

2、 Functional Features

Functional category description

The control function receives instructions from the main control system and drives subsystems such as motors, valves, electromagnetic devices, etc

The signal interface exchanges data or status signals with the upper control board (such as CPU board)

Voltage/current management provides a stable signal voltage channel with functions such as current limiting and protection

Device communication bridging establishes communication channels between multiple subsystems to ensure collaborative operation of the system

3、 Typical application areas

Photolithography pre-processing and post-processing system (Coater/Developer)

Control the execution modules such as the rotating platform, vacuum clamping, and developer spraying system.

CVD/PVD thin film deposition system

Used to adjust process parameters such as temperature, gas flow rate, plasma power control, etc.

Etcher equipment

Control parameters such as gas switching and chamber pressure during plasma etching process.

Vacuum transmission system

Control the vacuum door, vacuum pump interlock logic, etc.

Product imag

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