TEL Tokyo Electron 3D81-000040-V2 processor module

TEL Tokyo Electron 3D81-000040-V2 processor module

Product Details Introduction

product name

TEL Tokyo Electron 3D81-000040-V2 processor module

Product Type: Control Processing Module/Processor Board

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Introduction

This module is an embedded control core component used in TEL semiconductor equipment, responsible for key functions such as data processing, logic control, and system coordination during equipment operation. Its main responsibilities include:

Manage and control the operational logic and action flow of equipment

Real time collection of sensor data and making logical judgments

Start, stop, and schedule equipment submodules (such as heaters, valves, vacuum pumps, robotic arms, etc.)

As the main control CPU board or embedded system core, running embedded operating systems or customized firmware

Support data communication with HMI (Human Machine Interface) or remote monitoring system

2、 Typical application areas

1. Etching Systems for wafer etching equipment

Control plasma generation, power regulation, etching time, and gas flow rate inside the vacuum chamber

Realize precise control and feedback adjustment of process parameters

2. Chemical vapor deposition system (CVD/ALD)

Manage key variables such as sedimentation temperature, gas ratio, reaction time, etc

Ensure that the sedimentation thickness and uniformity meet the process requirements

3. Wafer Handling Systems

Control the actions of robotic arms, tracks, elevators, Loadlock doors, etc

Realize efficient and high-precision wafer handling and docking

4. Lithography and cleaning equipment

Responsible for controlling actions such as light source control, exposure alignment, and focusing in lithography equipment

Control the execution units such as nozzles, fluid pressure, and motor operation in the cleaning system

Product imag

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