TEL Tokyo Electron 2L80-000212-13 Driver

TEL Tokyo Electron 2L80-000212-13 Driver

Product Details Introduction

TEL Tokyo Electron 2L80-000212-13 Driver Module

Type: Driver Module/Actor Driver

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

The 2L80-0000212-13 driver is a control module used for executing components in semiconductor equipment, such as motors, solenoid valves, linear actuators, etc. It mainly performs the following functions:

Receive control signals from the main control system or embedded processor

Amplify control signals to drive high-power loads (such as servo motors, stepper motors)

Provide precise speed control, position control, or torque control

Implement closed-loop feedback control and operate in conjunction with sensor modules

Equipped with electrical protection functions, such as overload, overvoltage, and overcurrent protection

2、 Typical application areas

1. Wafer Transfer Module

Drive vacuum manipulator, rotating arm, Z-axis lifting platform and other devices

Realize precise wafer handling, alignment, loading and unloading

2. Vacuum chamber action control system

Control the opening and closing actions of vacuum valves, positioning mechanisms, or drive motors for chamber doors

Support multi-point positioning and closed-loop feedback to enhance cavity safety and reliability

3. Valve controlled driving in chemical vapor deposition (CVD) or etching systems

Drive gas proportional control valve, solenoid valve or switching valve

Accurately adjust gas flow rate, ratio, and response timing

4. Cooling or heating platform drive device

Drive heat sink, cold plate adjustment components or fans/liquid cooling pumps

Maintain temperature uniformity and stability inside the cavity

Product imag

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