TEL Tokyo Electron 2L08-00005-12 Sensor Module

TEL Tokyo Electron 2L08-00005-12 Sensor Module

Product Details Introduction

TEL Tokyo Electron 2L08-00005-12 Sensor Module

Type: Sensor Module

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

This module is a dedicated sensor interface or integrated sensor unit in TEL semiconductor equipment, typically used for:

Monitor a key physical parameter inside the device (such as temperature, pressure, flow rate, position, voltage, etc.)

Feedback analog or digital signals to the main control system for real-time adjustment or safety interlocking

Used for closed-loop control systems, in conjunction with actuators to accurately adjust the operating status of equipment

Equipped with modular packaging, it is easy to independently install and replace within specific cavities or system modules

2、 Typical application areas

1. Vacuum chamber management system (Etcher/CVD)

Detect the pressure, temperature, or gas flow rate inside the chamber

Feedback data is used to adjust equipment such as vacuum pumps, MFCs (Mass Flow Controllers), heaters, etc

2. Wafer Handling/Load Port System

Detect the position, speed, and in place status of the robotic arm or lifting platform

Ensure precise and error free movements during wafer handling

3. Liquid or chemical supply system (Wet Station/Cleaning)

Detect liquid temperature, pressure, flow rate, etc

Ensure stable supply of cleaning solution, avoid drying up, overpressure or abnormal temperature control

4. Thermal Management Module

Real time monitoring of temperature distribution of heating platform, cooling plate and other devices

Adjust current or fluid circulation system in conjunction with PID controller

Product imag

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