TEL Tokyo Electron 808-52170-3 Printed Circuit Board

TEL Tokyo Electron 808-52170-3 Printed Circuit Board

Product Details Introduction

TEL Tokyo Electron 808-52170-3 Printed Circuit Board

Type: PCB Control Board/Interface or Logic Circuit Board

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

This circuit board is a core electronic module in TEL semiconductor manufacturing equipment, typically used for the following purposes:

As a carrier platform for signal processing, logic control, or power regulation circuits

Implement communication and data exchange between the control system and the execution unit

Logical judgment, buffering, isolation, or filtering of input/output signals

Support connection and coordinated control between external sensors, actuators, or other boards

2、 Typical application areas

1. Semiconductor Etching Systems

Control the plasma generator, vacuum chamber valves, power status, etc

As the signal relay and judgment logic core of the etching system

2. Thin film deposition equipment (CVD/ALD/PVD)

Used to control key components such as gas proportional valves, heaters, pressure sensors, etc

Realize dynamic adjustment of temperature, flow rate, and pressure

3. Wafer Handling System

Control the handling robot arm, motor drive, sensor feedback, etc

Ensure accurate and safe transfer of wafers between process chambers

4. Auxiliary daughter board in the main control unit of the system

Provide signal conversion and interface bridging for main CPU board, communication board, etc

Support digital and analog input/output

5. Cleaning and Drying System (Wet Bench/Scrubber)

Control the operating logic of nozzles, heaters, flow pumps, etc

Realize process control automation

Product imag

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