TEL Tokyo Electron 2L80-002259-11 Temperature Control Unit

TEL Tokyo Electron 2L80-002259-11 Temperature Control Unit

Product Details Introduction

Product Name: TEL Tokyo Electron 2L80-002259-11 Temperature Control Unit

Equipment type: Temperature control unit

Manufacturer: Tokyo Electron Ltd

1、 Main application areas

Semiconductor Manufacturing Equipment

Mainly used for cleaning, coating, photolithography and other process equipment of Tokyo Electron.

temperature control

Implement temperature control of key components of the equipment to prevent overheating or abnormal temperature.

equipment protection

Assist in controlling the safety linkage of temperature sensors, heaters, and other actuators.

2、 Typical Function Overview

Temperature monitoring and regulation

Abnormal temperature alarm

heater control

Temperature sensor interface

Equipment temperature protection

Modular design for easy maintenance

3、 Adaptation system or product series (example)

Tokyo Electron Clean Track Series

Tokyo Electron Coating and Photolithography Equipment

Other semiconductor process equipment requiring temperature control

Product imag

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