TEL Tokyo Electron 1B80-002390-11 Valve Area Plate

TEL Tokyo Electron 1B80-002390-11 Valve Area Plate

Product Details Introduction

TEL Tokyo Electron 1B80-002390-11 Valve Area Plate - Product Application Fields

Gas flow path management and distribution

This valve area board is used to precisely control the gas flow and distribution in various process areas inside semiconductor equipment, ensuring stable supply of process gases as required.

Regional valve control

Responsible for opening and adjusting valves in multiple areas of the equipment, controlling gas flow and pressure, and maintaining stable process conditions.

Automation system integration

As an important component of the equipment automation control system, it collaborates with the main control system to achieve centralized management and monitoring of multi zone valves.

Fault monitoring and safety interlocking

Real time monitoring of valve status and gas flow path abnormalities, triggering alarms and safety interlocks when abnormalities occur to ensure equipment and personnel safety.

Modular design facilitates maintenance

Adopting a modular structure facilitates quick replacement or upgrade during equipment maintenance, improving the maintainability and reliability of the equipment.

Product imag

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