TEL Tokyo Electron 3381-000113-12 Lighting Control Board
Product Details Introduction
TEL Tokyo Electron 3895-120536-12 Interface Board - Product Application Fields
1. Signal conversion and connection of semiconductor equipment
This interface board serves as a signal bridge for electrical connection and communication conversion between the main control system (such as PLC or industrial computer) and multiple subsystems (such as mass flow controller MFC, sensors, actuators, etc.), ensuring accurate and error free transmission of control signals.
2. Process gas control system
In key processes such as semiconductor etching, deposition, and cleaning, it is often used in conjunction with multi-channel MFC (Mass Flow Controller) interfaces to support precise gas flow reading and control command distribution.
3. Equipment automation I/O interface module
Responsible for receiving multiple input/output signals, such as temperature, air pressure, voltage feedback signals, as well as commands to control valves, air pumps, and electromagnetic switches, it is the I/O centralized control unit of the entire automation system.
4. Safety interlocking and system monitoring
The interface board supports system fault detection. If abnormal gas flow, power imbalance, signal interruption, etc. are detected, it will be linked to the main control system to trigger an alarm or automatic shutdown measures, thereby preventing equipment and product damage.
5. Equipment maintenance and modular upgrading
Modular design facilitates on-site replacement and rapid maintenance, and is commonly used for system upgrades of TEL equipment during after-sales maintenance or functional expansion, supporting long-term reliable operation.
summarize
The TEL 3895-120536-12 interface board is an important control and communication module in semiconductor manufacturing equipment, widely used in process equipment such as etching, deposition, and cleaning, especially suitable for complex gas flow path management and signal integration control scenarios. It has the characteristics of high reliability, easy maintenance, and strong adaptability.
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