TEL Tokyo Electron 3381-000113-12 Lighting Control Board

TEL Tokyo Electron 3381-000113-12 Lighting Control Board

Product Details Introduction

1. Lighting control of process chamber

This control board is used for lighting management of chambers or workbenches inside semiconductor equipment, such as exposure machines, etching equipment, or coating and developing machines.

Control the brightness, switch, and lighting quality of the light source to ensure reliable lighting conditions for process personnel during maintenance, repair, or visual inspection.

2. Visual inspection and calibration support

Before starting or maintaining the equipment, provide uniform illumination through standardized lighting, and cooperate with CCD camera system to perform optical detection, positioning calibration, and fault inspection.

Help improve the accuracy and repeatability of visual inspection systems, and strengthen process control.

3. Visualization of automation operation status

The board can adjust the lighting brightness or working mode according to different working states of the device (standby, running, fault, etc.), helping operators quickly identify the device status.

4. Safety warning and status indication

By controlling light sources of different colors or flashing patterns, it can serve as a visual indication in case of equipment failure or alarm status, providing assistance for rapid response.

5. Energy optimization and reliability improvement

Control the power output of lighting components such as LED or xenon lamps to achieve efficient, stable, and long-lasting lighting configurations.

Ensure that the equipment does not affect the process or increase maintenance difficulty due to lighting failures in a cleanroom environment with millions of units.

Product imag

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