TEL Tokyo Electron 381-600196-7 Control Unit

TEL Tokyo Electron 381-600196-7 Control Unit

Product Details Introduction

TEL Tokyo Electron 381-600196-7 Control Unit - Product Application Fields

1. Control of exhaust gas treatment system (scrubber)

This control unit is used in the exhaust gas purification system of TEL semiconductor equipment to control the chemical gas treatment process, including the start stop and adjustment of pumps, valves, fans and other devices, to ensure the effective discharge and purification of process exhaust gas.

2. Safety guarantee of process environment

By monitoring parameters such as gas flow rate, pressure, and temperature, abnormalities can be detected in a timely manner, triggering safety interlock mechanisms to prevent harmful gas leaks, which is crucial for ensuring the safety of clean rooms and personnel.

3. Integrate with the main control system for operation

This module serves as an I/O interface control board and collaborates with the TEL main control system to ensure that the exhaust gas treatment system works synchronously with the main equipment, achieving linkage control and abnormal feedback.

4. Automated operation and maintenance support

Implement automatic start stop, fault alarm, status monitoring and other functions of the Scrubber system, improve the automation level of the system, and support remote monitoring and maintenance strategy optimization.

5. Environmental compliance and green manufacturing

The control unit helps ensure that exhaust gas treatment complies with environmental regulations and is an important component of TEL equipment that meets international standards such as ISO, RoHS, SEMI, and is widely used in green production processes.

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