TEL Tokyo Electron 3D81-000065-V1 Controller

TEL Tokyo Electron 3D81-000065-V1 Controller

Product Details Introduction

TEL Tokyo Electron 3D81-000065-V1 Controller Module - Product Application Fields

1. Control system for semiconductor etching equipment

This controller module is mainly used for etching equipment such as TEL's T-3044SS, responsible for power supply and control functions in the entire system, ensuring the stable operation of key processes such as plasma etching.

2. Power Supply Control

As a "PS Controller", this module is responsible for managing the power supply of multiple components of the device (such as RF power supply, valves, gas control units, etc.), accurately adjusting power to meet the requirements of different process steps.

3. Communication and interface integration

This module also serves as an interface board for data communication between the main control system and peripheral modules, supporting signal synchronization, data acquisition, and response control. It is a key interface for system linkage operation.

4. Fault detection and protection mechanism

Equipped with basic power monitoring and anomaly detection functions, it can monitor the output status in real time and issue alarms or automatically disconnect when voltage and current are abnormal, ensuring the safe operation of the equipment.

5. Equipment maintenance and replacement applications

During equipment maintenance, replacement of aging components, or system upgrades, this module can be used as a standard replacement to quickly restore equipment functionality and is one of the commonly used spare parts for on-site maintenance of TEL equipment.

Product imag

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