TEL Tokyo Electron 1D81-000128 Interface Relay Board

TEL Tokyo Electron 1D81-000128 Interface Relay Board

Product Details Introduction

TEL Tokyo Electron 1D81-000128 Interface Relay Board is a module designed specifically for semiconductor manufacturing equipment, used for signal isolation, input/output control, and electrical protection. This module is a key interface connecting the main controller and execution components in TEL systems, widely used in plasma etching CVD、 Cleaning and other equipment.

1、 Basic Product Information

Project Content

Product Name: Interface Relay Board

Product model 1D81-000128

Manufacturer Tokyo Electron Ltd. (TEL)

Type Electrical Signal Conversion and Isolation Module

2、 Main functions

The 1D81-000128 relay board typically assumes the following responsibilities in TEL equipment:

Functional category description

Signal isolation isolates the main controller from the high-voltage/strong current execution module, enhancing system safety and stability.

Signal conversion converts TTL/PLC control signals into relay contact signals to drive external devices.

Output drive controls loads such as solenoid valves, contactors, alarm devices, and executive motors.

Input feedback collection receives external action feedback signals (such as threshold switches, travel switches) and sends them back to the main controller.

3、 Typical application areas

This interface relay board is suitable for the following systems and modules in TEL semiconductor equipment:

1. Vacuum chamber control system

Control the action of vacuum pumps and valves;

Realize control and feedback of chamber pressure status.

2. Gas supply system (GAS BOX)

Control Mass Flow Controller (MFC);

Drive the gas supply valve and interlock it.

3. Wafer transfer system

Control the process arm, lifting mechanism, and fixture system;

Implement wafer position status input acquisition.

4. Heating and cooling system

Control the power switch of the heating unit;

Implement heating status feedback monitoring.

Product imag

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