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TEL Tokyo Electron 1D81-000118 Electronic Control Unit
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- Delivery date: stock
- The quality assurance period： 365 days
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TEL Tokyo Electron 1D81-000118 Electronic Control Unit
Product Details Introduction
TEL Tokyo Electron 1D81-000118 Electronic Control Unit (ECU) is a highly integrated control module widely used in TEL semiconductor manufacturing equipment for precise logic control, status monitoring, and action coordination of critical subsystems.
1、 Basic Information
Product Name: Electronic Control Unit
Product Model: 1D81-000118
Manufacturer: Tokyo Electron Limited (TEL)
Function category: Embedded Control Module/Distributed Control Unit (DCU)
2、 Main functions
As one of the system brains, this control unit has the following main functions:
Function Category Function Description
Logic control controls the working logic of executing components such as solenoid valves, motors, pumps, sensors, etc.
Signal acquisition and feedback receive sensor data such as temperature, pressure, and gas flow rate, and provide real-time feedback to the main system.
The communication bridge communicates with the main controller through CAN, RS485, EtherCAT, or dedicated TEL protocols.
State diagnosis provides fault detection, equipment operation status monitoring, and alarm signal output.
3、 Application Fields
1. Core equipment for semiconductor manufacturing
This control unit is mainly used in the following system modules:
Plasma etching equipment (Etchers)
CVD/ALD film formation system
Photolithography and development equipment
Wafer cleaning and drying equipment
Vacuum system (pump/valve control)
2. Subsystem module control
Temperature control system for cavity heater
Mass Flow Controller (MFC) gas flow control
Multi axis process arm or handling machinery
Pressure/temperature closed-loop regulation system
Product imag
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