TEL Tokyo Electron 2184-020462-11 Relay Module

TEL Tokyo Electron 2184-020462-11 Relay Module

Product Details Introduction

The TEL Tokyo Electron 2184-020462-11 relay module is an electrical control and signal switching component used in semiconductor manufacturing equipment, widely used in power control, signal isolation, and action switching systems of equipment under the TEL brand.

1、 Basic product information (inferred from comparison with similar modules)

Product model: 2184-020462-11

Product type: Relay Module

Manufacturer: Tokyo Electron Limited (TEL)

Function Overview: Used for switch control in circuits, achieving isolation, conversion, and amplification of electrical signals.

2、 Main functions

Function Description

The signal isolation between the electrical isolation control circuit and the execution circuit protects the core circuit.

Signal amplification drives larger current loads such as solenoid valves, heaters, motors, etc. with small currents.

Program control is combined with PLC or main control system to achieve automated sequential control.

Abnormal protection quickly cuts off the load in case of abnormal current, playing a protective role.

3、 Application Fields

This relay module is mainly integrated into the following systems of TEL semiconductor equipment:

1. Vacuum chamber control system

Control the heating element of the chamber, start and stop of the vacuum pump, and valve action;

Realize interlocking between multiple devices.

2. Gas transportation and mixing system

Control MFC (Mass Flow Controller) and valve opening and closing;

Realize precise fluid distribution control.

3. Power control and switch signal management

Power switches for heating zones, RF modules, or other power devices in the control system;

Multi channel signal synchronous switching.

4. Cleaning equipment and handling machinery systems

Relay driven transmission execution components (such as robotic arms, linear sliding tables, process arms);

Control action sequence logic and safety interlock.

Product imag

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