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  • Novellus Systems 03-417236-00 Interface Board
  • Novellus Systems 03-417236-00 Interface Board
  • Novellus Systems 03-417236-00 Interface Board
Novellus Systems 03-417236-00 Interface Board Novellus Systems 03-417236-00 Interface Board Novellus Systems 03-417236-00 Interface Board

Novellus Systems 03-417236-00 Interface Board

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  • Delivery date: stock
  • The quality assurance period: 365 days
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Novellus Systems 03-417236-00 Interface Board

Product Details Introduction

The Novellus Systems 03-417236-00 Interface Board is a specialized communication and control bridging module used in Novellus semiconductor process equipment. It mainly undertakes the signal conversion, relay, and module interconnection functions within the system, and is a key component for achieving multi module collaborative control of the equipment.


1、 Basic Information

Product Name: Interface Board


Product model: 03-417236-00


Manufacturer: Novellus Systems Inc. (merged into Lam Research)


Component type: Control communication bridge module/Multi channel I/O interface board


Typical applications: signal transmission between modules, electrical connections, data channel relay


2、 Core functions

Function type description

Signal allocation and conversion are used to transfer, condition, and transmit control signals from the main control system to various subsystems (such as valve control boards, sensor modules, etc.)

Multi channel I/O support supports multiple analog/digital inputs and outputs, used to control multiple external devices or sensors

Bus relay bridging may connect channels between multiple communication protocols (such as RS232, RS485, CAN, I ² C, SPI, etc.)

The system integration bridge serves as the "central node" between the CPU control module and downstream execution modules

Electrical isolation protection includes signal isolation and surge protection, which improves the overall stability and anti-interference ability of the system


3、 Application device scenario (speculated)

This interface board may be widely used in the following device series of Novellus:


Concept series (PECVD/SACVD/HDP)


ALTUS series (ALD)


Speed series (metal deposition)


INOVA or VECTOR platform


In these systems, the board may be connected to the following device subsystems:


Process Gas Control Module (MFC Control)


Vacuum pump controller and pressure sensor


Chamber heater/cooling system


Electric valve control unit


Main controller/PLC communication path

Product imag

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