KLA Tencor 710-029421-00 Controller Board

KLA Tencor 710-029421-00 Controller Board

Product Details Introduction

The KLA Tencor 710-029421-00 controller board is one of the core control modules used in KLA Tencor semiconductor detection and measurement equipment, mainly responsible for coordinating and executing the operation logic and control commands of various subsystems (such as motion platform, image processing unit, sensor interface, etc.). This controller board plays a key role in achieving automated detection processes, high-precision data acquisition, and system synchronization.

1、 Product Overview

Product model: 710-029421-00

Product type: Controller Board

Brand: KLA Tencor

Functional positioning: Device main control or subsystem control, responsible for logic processing, instruction distribution, status monitoring and other functions

2、 Core functions

Function module description

Motion control interface controls the execution components of X/Y/Z axis platforms, automatic alignment systems, or detection heads

I/O control function manages digital and analog inputs and outputs, connects sensors, drivers, alarms, etc

Real time data communication with the upper computer (main control system) or other boards (such as image board, power board)

Multi task processing capability supports simultaneous control of multiple subsystems, such as image acquisition units, scanning platforms, laser modules, etc

Real time feedback module operation status for system status management, providing fault diagnosis and interlock protection functions

3、 Typical application scenarios

Wafer inspection equipment

Control the synchronous movement of the wafer stage, alignment system, and detection optical path to achieve high-precision image acquisition and analysis.

Automatic Optical Inspection (AOI) System

Manage the initiation, scanning, image acquisition, data transmission, and judgment processes of the detection process.

Laser interference measurement system

Control the coordinated operation of laser and displacement sensor for precise measurement of film thickness, surface profile, etc.

Interface control of automation equipment

As a control platform, it integrates control with robot arms, fixtures, conveyor belts, and other equipment.

Product imag

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