Novellus Systems 03-169460-00 Interlocking Board

Novellus Systems 03-169460-00 Interlocking Board

Product Details Introduction

The Novellus Systems 03-169460-00 interlock board is a safety control module designed specifically for Novellus semiconductor equipment. It is mainly used for real-time monitoring and interlock management of critical states during equipment operation, ensuring that the equipment can only be started or continue to operate under safe conditions.

The application areas of Novellus Systems 03-169460-00 interlocking board products are as follows:

Equipment safety control system

Used to monitor whether the chamber door, outer cover, etc. are closed to prevent starting the equipment in an unprepared state.

Vacuum system interlock control

Determine whether the vacuum chamber pressure meets the standard. If it does not meet the conditions, prohibit process operation to avoid equipment damage or process failure.

Safety monitoring of gas source and power supply

Interlock the gas supply and main power status to ensure that the gas and electricity are within a safe range before operation is allowed.

Determination of process start-up conditions

The combination of multiple interlocking input signals is used to determine whether the startup requirements are met, ensuring that the system is in a safe state during process startup.

Emergency stop response

When abnormal conditions are detected (such as lid opening, abnormal pressure, high temperature, etc.), immediately trigger shutdown or interrupt operation.

Interacting with the main controller

Upload the interlocking signal to the system control board to form a closed-loop process safety logic control.

Suitable for multiple Novellus platforms

Commonly used in devices such as the Concept series and ALTUS series to achieve multi-point collaborative interlocking functionality.

Fault alarm and maintenance assistance

If a certain safety condition is not met, the board can output diagnostic information for engineers to quickly locate the problem.

Product imag

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