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  • KLA Tencor 710-652697-00 Sensor Module
  • KLA Tencor 710-652697-00 Sensor Module
KLA Tencor 710-652697-00 Sensor Module KLA Tencor 710-652697-00 Sensor Module

KLA Tencor 710-652697-00 Sensor Module

KLA Tencor 710-652697-00 Sensor Module

Product Details Introduction

The KLA Tencor 710-652697-00 sensor module is an important electronic unit in the KLA Tencor semiconductor detection equipment, mainly used to collect and process signals from various sensors, providing accurate data support for the automatic control and detection functions of the equipment.


1、 Basic Product Information

Model: 710-652697-00


Type: Sensor Module


Series: KLA Tencor 710 Series


Functional positioning: Collecting, amplifying, conditioning, and transmitting sensor signals as an important input unit for control systems


2、 Main functions

signal acquisition


Receive analog or digital signals from various sensors such as optical sensors, laser sensors, position encoders, etc.


Amplify, filter, and condition the signal to ensure signal quality.


Signal Conversion


Convert the collected signals into standard format and adapt them to subsequent control and processing units.


Support multi-channel input and achieve multi-point data collection.


data transmission


Transmit signals to the main control board or data processing module through standard interfaces.


Support real-time data updates to meet high-speed detection requirements.


Status monitoring and protection


Monitor the working status of the monitoring module and sensors to prevent abnormal signals from affecting equipment operation.


Built in electrical protection mechanism to prevent damage caused by overcurrent and overvoltage.


3、 Application Fields

Wafer Inspection and Measurement System

Connect various sensors to ensure the accuracy and stability of detection data.


Automated Control Platform

Collect information on mechanical motion, environmental parameters, etc. to assist in equipment operation control.


Image acquisition and processing system

Support optical sensor signal input to achieve high-precision defect detection.

Product imag

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