KLA Tencor 710-611534-000 Control Board

KLA Tencor 710-611534-000 Control Board

Product Details Introduction

The KLA Tencor 710-611534-000 control board is the core control module in the KLA Tencor semiconductor testing equipment, responsible for coordinating and managing the operation of multiple subsystems within the equipment, including motion control, signal processing, data communication, and other functions. It is one of the key hardware components for achieving equipment automation and high-precision testing.

1、 Basic Product Information

Model: 710-611534-000

Type: Controller Board

Series: KLA Tencor 710 Series

Main functions: Perform device motion control, signal management, system coordination, and data communication

2、 Main functions and features

Function Description

Motion control supports single axis or multi axis motion control to ensure wafer positioning and scanning accuracy

Signal processing manages sensor signal input and actuator signal output to achieve closed-loop control

The communication interface provides multiple communication protocol interfaces, such as RS-485, CAN, Ethernet, which facilitate communication with the upper computer and other modules

System coordination and integration of multiple subsystems for control, unified management of equipment operation status and processes

Fault detection and protection support real-time monitoring, alarm and safety protection, ensuring stable operation of equipment

Modular design facilitates equipment maintenance, upgrading, and expansion

3、 Typical application areas

Wafer surface defect detection system

Automatic Optical Inspection (AOI) equipment

Optical measurement and scanning platform control

Automated system for wafer loading and handling

Product imag

Related website links

HONEYWELL 05704-A-0146 Digital

1TGE120011R1111 Controller Module

PROSOFT MVI46-MCM communicatio

Other website links

BENTLY 350022M 138607-01系统模块卡件

ABB 1TGE120021R0610 HW3 通信模块

IS200EROCH1ABB燃机模块