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KLA Tencor 710-611536-000 Single Axis Controller
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KLA Tencor 710-611536-000 Single Axis Controller
Product Details Introduction
The KLA Tencor 710-611536-000 single axis controller is a key motion control module specifically designed for use in KLA Tencor semiconductor inspection equipment, responsible for precise control of single axis motion in the equipment. It is widely used in high-precision process links such as wafer scanning, positioning, and alignment.
1、 Basic Product Information
Product model: 710-611536-000
Product type: Single Axis Controller
Series: KLA Tencor 710 Series
Main function: Accurately control the motion trajectory, speed, and position feedback of a single axis, achieving closed-loop control
2、 Main functions and features
Function Description
High precision position control supports nanometer level positioning, utilizing encoders or grating rulers to achieve closed-loop feedback and ensure motion accuracy
Programmable speed curve and acceleration/deceleration control for smooth and vibration free motion
Multiple drivers compatible with servo motors, stepper motors, and other actuators
The communication interface provides real-time communication with the main control system and supports industrial buses such as CAN, RS-485, etc
Security protection has multiple protection functions such as overcurrent, overvoltage, and limit detection
Modular design facilitates replacement, maintenance, and system upgrades, improving equipment availability
3、 Typical application areas
Wafer scanning system
Control the X-axis or Y-axis of the scanning platform to achieve full coverage detection of the wafer surface.
Automatic alignment system
Perform micrometer level alignment of wafers or sensors to ensure accuracy in detection and processing.
Focusing and optical path adjustment
Control the movement of the Z-axis or optical components, adjust the focal length and optical path angle.
Mechanical arm motion control
Control the movement of a single axis robotic arm and support automated loading and handling.
Product imag
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