KLA Tencor 710-65760-20 Control Board

KLA Tencor 710-65760-20 Control Board

Product Details Introduction

The KLA Tencor 710-65760-20 control board is a critical autofocus control module widely used in the KLA Tencor 21XX series wafer inspection equipment, such as models 2132, 2135, 2138, and 2139. This type of equipment is used for optical inspection and quality control in semiconductor manufacturing processes.

Main application areas:

Autofocus system control

The control board is used to precisely drive and adjust the autofocus mechanism of the detection equipment, ensuring fast and accurate focusing at different wafer heights and pattern complexities.

Image acquisition and quality assurance

The autofocus capability is crucial for the quality of image acquisition. The control board dynamically adjusts the lens position through feedback control system, enabling the device to obtain clear images for subsequent analysis.

Semiconductor defect detection

Applied to critical defect detection processes such as pattern deviation, inconsistent line width, particle contamination, etc., the control board supports stable system operation and provides accurate image input for the discrimination algorithm.

Overall system coordination of equipment

As part of the internal communication and execution module, this control board works in conjunction with other electronic systems, participating in data exchange and system control logic to optimize the overall performance of the equipment.

System compatibility and upgrade

The control board design has good modular characteristics, supports equipment maintenance, replacement, and upgrading, and enhances the flexibility and reliability of the production line.

Core features:

Model: 710-65760-20

Function: Auto focus control, image focusing, system communication coordination

Application equipment: KLA Tencor 21XX series wafer inspection equipment

Features: High stability, high-precision control, fast response

Product imag

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