LAM 853-049542-173 Temperature Controller Module

LAM 853-049542-173 Temperature Controller Module 

Product Introduction

The LAM 853-049542-173 temperature controller module is a dedicated 24 channel temperature control board for Panlin etching equipment. It is used for closed-loop temperature regulation of chambers and electrodes, with high temperature control accuracy, and is suitable for semiconductor plasma process scenarios. Its application areas are as follows:

1. Temperature control of TCP9400 plasma etching host chamber

2. 12 inch wafer dielectric etching process equipment

3. Semiconductor silicon wafer conductor layer etching device

4. Etching process equipment for power devices

5. Etching and matching temperature control unit for storage chips

6. Compound semiconductor etching platform

7. Temperature regulation system for wafer electrode heating

8. High aspect ratio etching process control equipment

9. Etching chamber cooling circuit control device

10. Semiconductor Hard Mask Etching Machine

11. Advanced packaging etching processing equipment

12. Etching equipment chamber status monitoring unit

13. Plasma equipment for surface modification of wafers

14. Etching process research and development test platform

15. Panlin Etching Equipment Maintenance and Testing Platform

LAM 853-049542-173 temperature controller module with multi-channel synchronous regulation, resistant to plasma RF interference, maintains stable chamber temperature in a clean vacuum environment, ensuring etching rate and uniformity

Product imag

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