AMAT 0042-34691 Wafer Lift Assembly

AMAT 0042-34691 Wafer Lift Assembly

 Introduction

AMAT 0042-34691 Wafer Lift Assembly

Product Features:

1. Micron level precise lifting and positioning, smooth start stop, reducing the risk of thin wafer breakage

2. Ceramic top pin contact design, low particle output, protects wafer surface

3. Integrated position feedback sensor, equipped with upper and lower limit protection, safe and reliable operation

4. Vacuum chamber adaptation structure, temperature resistance, meets the requirements of semiconductor clean process environment

5. Modular assembly structure, components can be disassembled and assembled separately, making on-site maintenance of the equipment convenient

Application fields:

1. AMAT PVD physical vapor deposition chamber wafer transfer operation

2. CVD chemical vapor deposition chamber wafer lifting and handover

3. Wafer transfer between plasma etching chamber manipulator and electrostatic chuck

4.8-inch semiconductor wafer single-chip process equipment loading and unloading station

5. Replacement and maintenance of faulty spare parts for semiconductor production line equipment

6. Front chamber sheet lifting and alignment process for wafer testing

7. Thin film deposition process chamber wafer support and detachment action

8. Semiconductor equipment renovation project - cavity accessories

9. Research and development experimental machine platform for taking and placing crystal round samples

10. Front process chamber wafer lifting unit for chip manufacturing

The model of this wafer lifting component that is compatible with semiconductor cavity transfer is AMAT 0042-34691.

Product imag

ontroller Module

 DSSA165 48990001-LY control module
 DSTA131 57120001-CV Switch input card
 DSTD108 57160001-ABD Switch input card

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