TURBOVAC 800052V0001 Turbomolecular Pump

TURBOVAC 800052V0001 Turbomolecular Pump

 Introduction

TURBOVAC 800052V0001 turbo molecular pump, an industrial high vacuum molecular pump, is used to evacuate semiconductor equipment cavities.

Product Features

1. High pumping efficiency, able to quickly pump the cavity to the target vacuum level

2. Smooth operation, minimal vibration, and no impact on precision processes

3. Built in protection mechanism, automatically shuts down in case of overload or abnormality

4. Stable speed and good vacuum environment maintenance effect

5. Anti dust, able to adapt to working conditions where a small amount of residue is generated during the process

6. Good temperature resistance, with low pressure during long-term continuous operation

7. Equipped with status monitoring, both speed and temperature can be viewed

8. Compact structure, easy installation inside the machine

9. The rotor dynamic balance is well done with low noise

10. Long service life, reducing frequent maintenance and replacement

Application Areas

1. Vacuum chamber of semiconductor etching equipment

2. Thin film deposition vacuum equipment

3. Plasma process vacuum system

4. Precision analytical instrument vacuum chamber

5. Research vacuum experimental apparatus

TURBOVAC 800052V0001 turbo molecular pump has stable pumping speed and reliable vacuum performance, making it the core pumping spare part for various high vacuum process equipment

Product imag

ontroller Module

 UAD149 3BHE014135R0011 UAD149A00-0-11-4 controller
 UNS0119A-P V101 3BHE029153R0101 3BHE029154P4 card
UR6TH Integrated protection device

Other website links

WOODWARD 9907-1106 调速器
TRICONEX 1600071-001控制器模块
TRICONEX 4000093-306 安全控制器