SMC INR-224-730 chiller heat exchanger

SMC INR-224-730 chiller heat exchanger

 Introduction

SMC INR-224-730 chiller heat exchanger

Product Features:

1. Peltier type heat exchange structure, no refrigerant, environmentally friendly and leak free

2. High precision temperature control, minimal temperature fluctuations, ensuring thermal stability of semiconductor equipment

3. The liquid receiving part is made of corrosion-resistant material, suitable for circulating media such as ethylene glycol and fluoride solution

4. Compact and miniaturized structure, saving installation space inside the equipment cavity

5. Low vibration and low noise operation, will not interfere with precision process equipment

Application fields:

1. Temperature control circuit heat exchange of semiconductor etching machine

2. Cold water circulation and heat dissipation of wafer coating equipment

3. Constant temperature cooling system for precision laser equipment

4. Temperature control unit for semiconductor testing instruments

5. Replacement and maintenance of spare parts for chip process equipment

6. Laboratory precision sample temperature control equipment

7. Plasma process chamber heat exchange module

8. Semiconductor equipment renovation and renovation supporting components

9. Cooling station for production of optoelectronic precision devices

10. Microfluidic R&D equipment constant temperature heat exchange unit

The model of this chiller heat exchanger used for precision temperature control heat exchange is SMC INR-224-730.

Product imag

ontroller Module

 DSSA165 48990001-LY control module
 DSTA131 57120001-CV Switch input card
 DSTD108 57160001-ABD Switch input card

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