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  • TEL 2180-020298-V1 Heater Power Controller
  • TEL 2180-020298-V1 Heater Power Controller
  • TEL 2180-020298-V1 Heater Power Controller
TEL 2180-020298-V1 Heater Power Controller TEL 2180-020298-V1 Heater Power Controller TEL 2180-020298-V1 Heater Power Controller

TEL 2180-020298-V1 Heater Power Controller

TEL 2180-020298-V1 Heater Power Controller

 Introduction

TEL 2180-0202298-V1 Heater Power Controller

Product Features:

1. PID closed-loop power regulation, fast temperature control response, maintaining uniform and stable temperature of the crystal cone

2. Built in overload, overcurrent, and overheating protection to prevent damage to heating elements and ensure machine safety

3. Dedicated communication interface for semiconductor machines, capable of real-time interaction of temperature data with the cavity controller

4. High stability power output, small temperature drift, suitable for long-term continuous processes

5. Standardized board structure, plug-in installation, convenient on-site maintenance and replacement

Application fields:

1. TEL etching equipment wafer base heating power control

2. Semiconductor thin film deposition chamber heater driving unit

3. Temperature control and power supply module for plasma process chamber electrostatic chuck

Replacement of original spare parts for 4.8-inch wafer processing machines

5. Maintenance and replacement of semiconductor production line equipment faults

6. Heating circuit supporting components for equipment renovation project

7. Research and development of experimental machine platform, crystal circle heating platform, power control

8. Temperature control unit for wafer surface treatment process

9. Power supply control for heating module of semiconductor testing equipment

10. Front chip manufacturing chamber temperature control system

The model of the heater power controller that comes with this semiconductor etching equipment is TEL 2180-0202298-V1.

Product imag

2180-020298-V1.webp.jpg

ontroller Module

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PMB32D-00114-0170 EB 01b-E57160001-AU DSTD 130
PMB32D-00114-00NKLS0103BSE001693R2 BB510(DC5256)      
PMB32D-00101-0370 BT 01b1SAP240100R0001
PMB32D-00101-02AMAT 0100-002753BSE003879R1 BB174
PMB32D-00101-01AMAT 0100-0019557160001-AZ DSTD 150
PMB32D-00101-00AMAT 129-0201P21NSXA-LSS-NS-02


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