Ebara ETC010MA Turbomolecular Pump Controller

Ebara ETC010MA Turbomolecular Pump Controller

 Introduction

Ebara ETC010MA Turbomolecular Pump Controller

Product Features

Precise speed closed-loop control, stable driving of molecular pump, maintaining stable chamber vacuum degree

Integrated multiple protections, with abnormal shutdown alarm function for overcurrent heat pump body

Supports RS232 communication and IO signal interaction, and can be connected to the main control system of semiconductor machines

Compact rack design, compact size, easy to install and arrange in equipment cabinets

Real time collection of pump operation data, visualization of speed and temperature status, convenient troubleshooting

Application Areas

Drive control of semiconductor etching machine turbine molecular pump

PVD thin film deposition chamber high vacuum system matching

Start stop and status monitoring of CVD process chamber molecular pump

Wafer transfer load lock vacuum unit control

Replacement and maintenance of spare parts for molecular pumps in semiconductor production lines

Analysis instrument high vacuum chamber pump group drive

Vacuum control system for semiconductor equipment renovation project

Research and development of experimental vacuum machine, molecular pump power supply control

Vacuum circuit control unit for ion implantation equipment

Management of pump body speed regulation in high vacuum environment of coating equipment

The model of the turbo molecular pump controller used for driving and controlling vacuum molecular pumps is Ebara ETC010MA.

Product imag

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