Shinko MCMR-11-2 Single Arm Wafer Handling Robot Component

Shinko MCMR-11-2 Single Arm Wafer Handling Robot Component 

 Introduction

The Shinko MCMR-11-2 single arm wafer handling robot component is the atmospheric end wafer transfer robot arm of the semiconductor cluster equipment of Shengang Precision Machinery, responsible for transferring wafers between the chamber and the wafer box.

Product Features

1. Single arm telescopic structure, smooth movement, reduces the risk of wafer slip and edge breakage.

2. Made of clean grade material with low particle precipitation, suitable for semiconductor cleanrooms.

3. Multi axis servo linkage, high positioning accuracy, and stable position for repeated picking and placing of pieces.

4. Equipped with a wafer detection sensor, it can alert in advance for missing or misaligned wafers.

5. Modular component design saves time in disassembly, maintenance, and replacement.

Product Specifications

Model MCMR-11-2 single arm wafer handling module.

Suitable for 8-inch wafer transfer.

Servo multi axis drive, combined motion of extension and rotation.

Built in wafer presence and offset sensing circuit.

Support signal interaction on the main control bus of the machine.

Application Areas

Transfer the semiconductor cluster machine platform wafer box to the pre chamber.

Thin film deposition equipment for atmospheric wafer loading and unloading.

Replacement of mechanical arm spare parts for old Shinko cluster equipment.

Etching equipment front-end module wafer handling unit.

Semiconductor testing machine wafer automatic loading and unloading.

This single arm robotic arm is the core transmission component of the front-end module of clustered semiconductor equipment, ensuring stable wafer flow

Product imag

ontroller Module

 PM866A-2 3BSE081230R1 controller module
 PPE091A101 3BHE044481R0101 3BHE044477P3 controller
 TPPB-02 3HNA023200-00101 Logic card

Other website links

DSCA140A PLC控制系统
DSTA121A 数字离散输出模块
DSSB140 电源转换器模块