AE 3152224-039A Magnetron Power Module

AE 3152224-039A Magnetron Power Module 

 Introduction

The AE 3152224-039A magnetron power module belongs to the MDX series DC sputtering power supply and is a core power supply spare part for semiconductor PVD equipment.

Product Features

Stable output DC power ensures the uniformity of magnetron sputtering coating.

Equipped with arc suppression function, it provides rapid power reduction protection when the target material ignites.

Wide load adaptability range to cope with changes in working conditions caused by aging of target materials.

Rack mounted installation, convenient disassembly and replacement of spare parts on site.

Real time collection of power and current data for convenient fault diagnosis.

Product Specifications

Model 3152224-039A magnetron DC power supply.

Suitable for AMAT PVD thin film deposition machine.

High power DC output, used for driving magnetic targets.

Built in multiple protections for overcurrent, overvoltage, and overheating.

Support machine bus communication feedback of operating parameters.

Application Areas

Power supply for magnetron sputtering coating of semiconductor wafers.

Metal and dielectric thin film PVD deposition process.

Replacement of spare parts for AMAT's old sputtering machine power supply.

Magnetron target power supply unit for vacuum coating equipment.

Equipment for preparing compound semiconductor thin films.

This power supply is specifically designed to drive magnetron sputtering targets and is a key component in the wafer metallization coating process.

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