Agilent EX9698812 Turbomolecular Pump

Agilent EX9698812 Turbomolecular Pump 

 Introduction

Colleagues who do vacuum equipment maintenance should be familiar with the Agilent EX9698812 turbomolecular pump, which is commonly used to build high vacuum environments and is a commonly used spare part in semiconductor and analytical equipment.

Product Features

1. High pumping efficiency, able to quickly pump the cavity to a high vacuum state

2. The operation vibration is small and will not interfere with the stability of precision processes

3. Built in protection logic, automatically shuts down in case of overload or abnormality

4. The overall structure is compact, and the internal installation of the equipment does not take up too much space

5. The bearings are durable and have a low failure rate during long-term continuous operation

Product Specifications

1. Nitrogen pumping speed 700L/s

2. Rated speed 33300rpm

3. The ultimate vacuum can reach 1 × 10 ⁻¹⁰ mbar

4. Environmental working temperature: 5 ℃~35 ℃

5. Startup time less than 6 minutes

Application Areas

1. Vacuum maintenance of semiconductor thin film deposition equipment

2. Construction of high vacuum environment for wafer etching chamber

3. Vacuum system matching for mass spectrometry analysis instruments

4. Use of vacuum chamber in electron microscope

5. Replacement and maintenance of spare parts for old vacuum equipment

Overall, the Agilent EX9698812 turbomolecular pump has stable vacuum performance and is suitable for many precision equipment. It is very popular for production line maintenance and replacement.

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