Yaskawa XU-ACT067V-A00 Linear Motion Track Motor

Yaskawa XU-ACT067V-A00 Linear Motion Track Motor 

 Introduction

Yaskawa XU-ACT067V-A00 is an Yaskawa orbital linear motor module. It is a direct drive unit for the long stroke translation axis of the semiconductor machine platform, without the use of screw drive, resulting in faster motion response.

1. The direct drive structure has no screw backlash, with rapid start stop response and smaller positioning deviation during high-speed movement;

2. Low dust and clean design, with the rotor surface treated to adapt to a dust-free workshop environment;

3. Built in temperature sensor, real-time monitoring of coil temperature rise, automatic power limit protection for overheating;

4. Modular splicing of tracks, adjustable effective travel as needed, convenient for machine layout modification;

5. Low friction loss during operation, long-term continuous operation, reducing downtime maintenance frequency.

1. Peak thrust of 67N;

2. Closed loop position feedback of grating ruler;

3. Maximum moving speed of 1.2m/s;

4. Integrated outgoing line of power supply cable for moving parts;

5. Compatible with Yaskawa ∑ series servo drives.

1. Semiconductor EFEM robotic arm long stroke walking axis drive;

2. Large scale translational transport of wafer carriers;

3. High speed transfer of optical detection equipment substrates;

4. Vacuum chamber external substrate transfer module;

5. Long stroke positioning platform for precision measuring equipment.

This XU-ACT067V-A00 direct drive module does not require traditional lead screws and has good stability when transporting wafers over long distances. It is a commonly used precision linear motion spare part for semiconductor front-end equipment.

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