Home > Product > PLC programmable module > MKS 253B-31797 throttling butterfly valve

MKS 253B-31797 throttling butterfly valve

Introduction

#MKS 253B-31797 Throttle Butterfly Valve Product Features

MKS 253B-31797 is a vacuum exhaust throttle butterfly valve, commonly used for pressure regulation in semiconductor vacuum chambers.

1. Electric drive, achieving closed-loop regulation of vacuum pressure

2. Linearized transmission structure, smooth and stable pressure control

3. High positioning resolution and good adjustment accuracy of valve plate

4. Excellent sealing performance and low leakage rate

5. Fast response speed of full switch action

6. MKS 253B-31797 can be matched with MKS series pressure controllers for use

7. The part of the valve body in contact with the medium is made of stainless steel material

8. Adapt to high vacuum process chamber exhaust conditions

9. Strong resistance to pressure difference, able to withstand the pressure difference before and after the valve

10. Equipped with valve position feedback for easy system reading of status

11. Flange standard interface, easy to disassemble and replace

12. The motor has a wide operating temperature range and is suitable for the equipment environment

13. Mechanical gear transmission with low operating noise

14. Compatible with various process gases and corrosion-resistant

15. Compact structure, saving equipment installation space

MKS 253B-31797 has high control accuracy and good sealing performance, and is widely used in semiconductor vacuum process equipment.

Product imag

ontroller Module

Other website links